Fetching details from the dictionary...

a little; partially; somewhat; slightly; semi-; -ish; on the ... side; a short time; a while
この料理はやや辛い気がするけど美味しい。
I feel like this dish is a little spicy.
今日は気温がやや上がってきた。
The temperature has risen a little today.
今日の彼はやや疲れた様子で心配になった。
He seemed a little tired.